I found some small solenoid air valves at Surplus Center, one of which was tiny enough to be a good candidate for letting deuterium into my fusor.
It's their number 20-1452. Cheap, $6.95. I actually got samples of most of the valves on that page, but this one looked right for the application, with some tweaking. We want a tiny valve, a small "wasted" volume, and something easy to drive. This fits that bill, but has one problem, the fact that the output port is vented to atmosphere when the valve is shut. That turns out not to be real hard to fix, as the vent is through the solenoid pole piece center. I simply drilled it out and tapped it 6-32 (it has a hole already) so I can stick a screw n there and seal it up. Because of the way this is made, for high vacuum work, we switch the direction, eg the port marked "in" is the one that goes to your vacuum tank, and the "out" port gets the supply gas. That's because there's less wasted volume on the "in" side, and more chances of leak on the "out" side, and if I'm going to have a leak, well, let it be an "out" rather than "into the system" leak.
The valve has 10-32 tapped ports, with hose barbs on them. I step drilled one of the barbs .125" and then .128" for a loose fit on the Cu tubing I'm going to solder into it. This doesn't leave a lot of metal, but on a lathe it's easy to drill this precisely enough. For the tank end, I through drilled a 10-32 3/4" long socket head SS screw with a 3/32 bit (broke a 1/16" bit when it seized in there). The head end I fit into a hole step drilled in a 2.75" CF flange (drilled the rest of the way through 1/8") and tig welded the head into the pocket in the flange. If it turns out to be needed, I can later add a little bit of that capillary tubing on the inside side of the flange, to slow down gas flow if I can't get a short enough pulse. I'm not starting out that way, as the valve looks like it's gong to be pretty fast. The coil works directly on a diaphram that has a tiny viton button in the center that seals over a tiny port, so a short pulse should not be too much gas for my large tank.
The plan is to put together a little circuit with 556 timers and fet drivers to drive this valve, and the somewhat larger one I use to bypass a valve between the turbo output and the forepump input, and have (for now) a couple buttons on it to control the gas pressure. Assuming things work as hoped, this might wind up being controlled by a microprocessor to hold conditions close to ideal with less effort and attention on my part. The idea behind the timers is to get a uniformly short valve open pulse off a pushbutton. If I wind up using a uP, then it can do that part, but for now, manual should do.
I will seal up my tig weld (might have a pinhole, take no chances) and the vent plug screw and coil interface with Hysol 1-C, since I have no plans of ever removing them. I will use well mixed (which can be a challenge) 5 min epoxy for the other "pipe dope" as I may want to remove the fittings, and that stuff isn't all that strong.
For the other side, I'm using a hard to find Burkert valve, but this valve from Surplus center (20-1463) looks ideal for that if anyone else is doing this, and the price is sure right -- another cheapo.

I wound up buying samples of most of the valves on that page, and these two are the winners for their respective tasks. The bigger valve for foreline use is rated 24v AC, which is kind of a pain, but I've tested it with DC and it works fine at a much lower voltage. It wants about 1 amp, so with it's 6 ohm coil, 5v will do the job fine, or 24v DC with a big series R. Since that would waste a ton of power, I'd go with a 5v supply, myself, or a capacitor coupled pulse if I wanted it super quick. So far, I've not had an issue with speed at that place, as I spin down the turbo anyway to make that less touchy with the valve I'm already using there.
So, snatch up these valves while you can. They have a bunch in stock today, but you should know how it goes with surplus -- gone tomorrow, and these are hard to find new (and to pay for at new prices).